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CryoSAS – Cryogenic Silicon Analysis System

The CryoSAS is a high-sensitivity system for the quality control of solar and electronic-grade silicon material according to international ASTM/SEMI standards.

Although sample cooling to very low temperatures is required, the fully automated system is easy-to-operate, as it does not require cryogenic liquids.

Key features include quantification of group III and V shallow impurities in single crystal Si, quantification of substitutional carbon in polysilicon or single crystal Si, and quantification of interstitial oxygen to polysilicon or single crystal Si.

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