SiBrickScan (SBS) is a dedicated at-line system for the Fourier transfer infrared (FTIR) quantification of interstitial oxygen in complete silicon ingots, resulting in a concentration profile along the longitudinal axis.
Accessing this information without sawing wafers or test samples is a major and cost-saving advantage.
Key features include an industry compatible and robust design, an intuitive and comfortable user interface, automated data evaluation and a robust linear drive.
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