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news.France-based Eveon and CEA-Leti have announced the demonstration of liquid-pumping for smart drug delivery in the bolus mode using a silicon-based micro-pump fabricated with a standard MEMS process.
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According to the company, the milestone is the first functional micro-pump integration using MEMS standard process on Leti’s 200mm line.
It is a result of FluMin3, which is part of the companies’ three-year joint-development project to produce an automatic drug-delivery system integrating a MEMS micro-pump that reduces patient discomfort by delivering medicine with very high accuracy, minimal loss and high flow rates.
FluMin3 is a major R&D program supported by the Rhone-Alpes competitive cluster Minalogic in collaboration with Cedrat Technologies and IMEP-LAHC, the Institute of Microelectronics Electromagnetism and Photonics, and Microwave and Characterization Laboratory.
The micro-pump is based on core technology started by Eveon and IMEP-LAHC.
The company said that the pump demonstrator is made from silicon wafers, which include a thin deformable membrane sealed over a fluidic cavity and fluidic valves determining inlet and outlet.
The first fluidic characterization of the device showed promising results with typical water-flow rates of 12 ml/min without any counter-pressure, and up to six ml/min under 1 bar counter-pressure.